Temperature dependence of discoloration for O2 cleaning No. 1
There is a tendency for the color difference ΔE*ab before and after processing to increase as the temperature rises.
We would like to introduce the temperature dependence of discoloration for O2 cleaning No.1 (high sensitivity type) technical data. In all cases, a tendency was observed that the color difference ΔE*ab before and after treatment increases with higher temperatures. "PLAZMARK O2 Cleaning" is an indicator optimized for detecting radical plasmas such as O2, N2, Air, CF4, H2, and NH3. It reacts to O2 radicals, making it applicable for UV cleaning and UV ozone cleaning as well. 【Overview (Card Type)】 ■ RF Plasma Device (Arios Co., Ltd.) ■ RF Power: 60W ■ Ar Gas Flow Rate: 40sccm ■ Achieved Vacuum Level: 5×10^-4Pa ■ Processing Pressure: 10Pa ■ Stage Temperature: 25–100℃ *For more details, please refer to the related links or feel free to contact us. *The first image is the card type, and the second image is the label type.
- Company：サクラクレパス PI事業部
- Price：Other
